Adeka Corporation (Tokyo, JP)

Disclosed are a composition that can be used to make a zinc oxide-based film comprising, as an essential component, a zinc compound represented by the following formula (1) #STR00001# where R.sup.1 and R.sup.2 are both independently representing an alkyl group with between 1 and 4 carbon atoms, a process for producing the film made of zinc oxide as well as the zinc compound. The composition makes it possible to produce a high-quality oxide-based film with transparency, homogeneity and electrical conductivity at a low temperature of C.

1. Field of the Invention

This invention relates to a composition for forming zinc oxide-based films on various substrates, and a method for creating a zinc oxide-based film that makes use of the composition and a zinc compound suitably suitable for use in the composition.

2. Description of related art

Numerous studies have been carried out on zinc oxide-based films. They are electrically conductive transparent films, electrode materials, and semiconductor materials. Reported asprocesses for forming a zinc oxide-based film by making use of a precursor compound made from zinc oxide include vapor-phase processes, like CVD process as well as ALD process, which allow the vaporized gas of the precursor compound into contact with a substrate (base material) as well as liquid-phase processes such as MOD process and sol-gel process, that allow a dispersion or solution of the precursor compound into contact with the substrate.

Zinc compounds that can be used as precursors to zinc-oxide compounds in these processes are alkoxides .beta.-diketone complexes organic acid metal salts, zinc alkyls and inorganic salts and others. These precursor compounds are transformed into zincoxide through reactions under temperatures and/or in conjunction with oxidizing agents.

Patent Document 1 describes a method of creating an extremely thin layer of zinc oxide. It involves bringing a suspended substance in which there is a fine powder of a compound or tiny particles are present to be able to touch a substrate and thermally decomposing that zinc compound to create zinc oxide. As such zinc compounds, zinc acetate, zinc acetylacetonate, zinc oxalate, and zinc lactate are disclosed.

Patent Document 2, on the other hand, describes a method for producing a transparent conductive film by bringing gas of an organic metal compound, said gas having been transformed into a plasma state, into contact with a substrate at atmosphericpressure or a pressure around atmospheric pressure. Patent Document 2 describes zinc oxide as a transparent conductive film. Ethyl Acetoacetate can be used as a ligand for the formation of an organic metal. Additionally, zinc acetylacetonate has been described as a zinc compound.

When making a zinc oxide-based film with the precursor compound, the temperature needed to transform the precursor compound into a film made of zinc oxide that is of sufficient quality to display the expected functionality is typically believed to C. However, it is desired to permit the transformation into an oxide-based zinc film at a lower temperature from the standpoint of the flexibility to work with the substrate of a resin, a reduction in damage to the substrate, the like. Thereis, accordingly, an outstanding desire for the process to produce a zinc oxide-based film at a lower film-forming temperature than prior to.

Patent Documents

Patent Document 1: JP-A-7-180060 Patent Document 2: JP-A-2004-22268

The invention can help be the solution to the problem

To address the issues of the traditional technologies being considered the goals of the present invention are to offer a composition for creating a film made of zinc oxide that is able to create at a low temperature of A high-quality, zinc oxide-based film that has transparency and homogeneity, conductivity, and a zinc compound that is useful for composition. The present invention also provides the method of producing an oxide-based zinc film that can be formatted at a low temperature of C. or lower for a high-quality zinc oxide-based film having transparency, homogeneity and conductivity.

Means for Solving the Issue

The inventors of the present invention discovered that a compound of zinc with an atomic structure that is capable of achieving the above mentioned objectives by conducting the thorough examination. This led to the invention becoming a reality. Describedspecifically, according to the present invention, there is provided a composition for forming a zinc oxide-based film, which comprises, as an essential component, a zinc compound represented by the following formula (1):

#STR00002## in which R.sup.1 and R.sup.2 mutually independently represent an alkyl group having between 1 and 4 carbon atoms.

R.sup.1 or R.sup.2 may be either one of the methyl groups in the formula (1) of the present invention.

According to the present invention, there is provided a method for making a zinc oxide-based film, comprising the following steps:

Apply the composition described above onto a substrate to form a coating layer.

Treating the coating layer at 150 to C. for the purpose of converting it into film.

The invention also offers zinc compounds with the formula (2).

Click here to view the patent on USPTO website.

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